vacuum to atm flow rate

[savoiesrus]

I have a 19 cuft vacuum chamber that I want to back fill with a mixture of Neon/Xenon gas (90/10). This mixture is already mixed in tanks at 2500psi, regulated own to whatever lower pressure necessary.

The vacuum chanber is back filled from full or partial vacuum to atmosphere using a valve. I want the back fill to occur in less than 10 minutes. I plan on sending the mix thru a gas purifier. I want to size this purifier in terms of flow rate.

I need help to esimate the flow rate. I can size the line as I see fit, but generally, the lines are 1/4" stainless steel tubing.

Marc

[savoiesrus]

Oh, the vauum is 10-5 to 10-6 torr, and the partial vacuum condition is 200 to 600 torr. The worst case is the high vacuum.